This book reviews the progress achieved in SiC research and development, particularly over the past 10 years. It presents the essential properties of 3C-, 6H- and 4H-SiC polytypes including structural, electrical, optical, surface and interface properties; describes existing key SiC devices and also the challenges in materials growth and device fabrication of the 21st century.
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This book reviews the progress achieved in SiC research and development, particularly over the past 10 years. It presents the essential properties of 3C-, 6H- and 4H-SiC polytypes including structural, electrical, optical, surface and interface properties; describes existing key SiC devices and also the challenges in materials growth and device fabrication of the 21st century.
Imprint | Springer-Verlag |
Country of origin | Germany |
Series | Springer Series in Materials Science, 73 |
Release date | June 2004 |
Availability | Expected to ship within 12 - 17 working days |
First published | 2004 |
Editors | Zhe Chuan Feng |
Dimensions | 235 x 155 x 26mm (L x W x T) |
Format | Hardcover |
Pages | 452 |
Edition | 2004 ed. |
ISBN-13 | 978-3-540-20666-8 |
Barcode | 9783540206668 |
Categories | |
LSN | 3-540-20666-3 |