Multi-Wafer Rotating MEMS Machines - Turbines, Generators, and Engines (Hardcover, 2010 ed.)

Research and development in the area of Power MEMS has been driven by the need for compact power sources with high energy and power density. The seminal research in the field has been conducted at Massachusetts Institute of Technology (MIT). Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. The MIT Gas Turbine Engine is intended to be a power MEMS device that will produce 10 Watts or more of electrical power from a shirt-button-sized package. This device is a gas-turbine engine that drives an integrated electric generator. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book will discuss the technical details that have gone into producing the engine and the overall systems-level tradeoffs and decisions that have been made.