Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.)
Hans H. Gatzen, Volker Saile, Jurg LeutholdFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
R4,564
Or split into 4x interest-free payments of 25% on orders over R50
Learn more
45640
@R428pm x 12* 
Ships in 12 - 17 working days
Add to wish listReview this Item
Donate to Against Period Poverty
Product Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Customer Reviews
No reviews or ratings yet - be the first to create one!
Product Details
General
Imprint | Springer-Verlag |
Country of origin | Germany |
Release date | 2015 |
Availability | Expected to ship within 12 - 17 working days |
First published | 2015 |
Authors | Hans H. Gatzen, Volker Saile, Jurg Leuthold |
Dimensions | 235 x 155 x 31mm (L x W x T) |
Format | Hardcover |
Pages | 519 |
Edition | 2015 ed. |
ISBN-13 | 978-3-662-44394-1 |
Barcode | 9783662443941 |
Categories | Books - All Books  Professional & TechnicalMechanical engineering & materialsEngineering skills & tradesTool making |
LSN | 3-662-44394-5 |
Similar Products | Recommended ProductsSee more 
Trending On Loot
Be the first to know about our
latest deals & promos! Subscribe Now
