MEMS Mechanical Sensors (Hardcover)
Steve P. Beeby, Graham Ensel, Michael E. Kraft, Neil M. WhiteThe main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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Product Description
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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Product Details
General
Imprint | Artech House Publishers |
Country of origin | United States |
Release date | April 2004 |
Availability | Expected to ship within 10 - 15 working days |
First published | May 2004 |
Authors | Steve P. Beeby, Graham Ensel, Michael E. Kraft, Neil M. White |
Dimensions | 254 x 178 x 17mm (L x W x T) |
Format | Hardcover - Laminated cover |
Pages | 284 |
ISBN-13 | 978-1-58053-536-6 |
Barcode | 9781580535366 |
Categories | |
LSN | 1-58053-536-4 |
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